RA312

Introduction

The RA312 Controller is a device that supplies +15VDC/-15VDC power to Mass Flow Controllers (MFCs) and Capacitance Manometers (CMs) and receives signals ranging from 0~5V/0~10V/4~20mA from each sensor, which are then displayed on a screen.

In addition, the device can be connected to a Convection Gauge to display pressure readings ranging from 1000Torr to 0.1mTorr, and all functions can be easily configured by the user using the front panel key.

The controller provides a range of functions, including an Auto Pressure Control feature that enables the control of MFC flow rates using a Convection Gauge or Capacitance Manometer, a RATIO control function that allows the control of multiple MFCs at different ratios, an accumulation function that accumulates the flow rate of each MFC for up to two years, and a monitoring function that enables the control of MFC flow rates using pressure readings from Convection and Capacitance Manometers, using 8 independent trip points.

The device can accommodate up to 8 Mass Flow Controllers, Capacitance Manometers, and Convection Gauges, and all information can be viewed on a 5.5-inch OLED screen without the need for any key operation. The external interface offers 8 independent relay trip points, RS232C/RS422/RS485, TTL flow ON/OFF, and analog IN/OUT, and a Windows program is provided to enable control via RS232C from a PC.